• 专利附录
  • 专利说明
  • 权利要求
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    • 专利摘要:
    The present invention relates to a device (1) such as a pressure sensor, comprising a substrate (10) and at least one liquid layer (2) arranged on said substrate (10). The liquid layer (2a, 2b, 2c) is covered with at least one coating layer (4) which is at least partially in contact with at least part of at least one of the surfaces of said liquid layer. The coating layer (4) can comprise several layers, at least one of which is an organic and / or inorganic coating layer. The invention is also carried out by a method of simultaneously coating a plurality of substrates. The invention is also achieved by a watch component or a watch comprising the device (1).
    公开号:CH716359A2
    申请号:CH00711/20
    申请日:2020-06-15
    公开日:2020-12-30
    发明作者:Hogg Andreas
    申请人:Coat X Sa；
    IPC主号:
    专利说明:

    Field of the invention
    The present invention relates to the field of the encapsulation of fluid materials on three-dimensional objects. More specifically, the invention relates to devices comprising liquid elements comprising single and multi-layered coating layers. Also disclosed are methods for making devices with such liquid elements. The invention also relates to applications of devices comprising coated liquid elements, such as horological or electronic applications such as ISFET transistors.
    Background of the invention
    The deposition of organic and inorganic layers is widely used as a protective coating for various micromechanical and electronic components.
    [0003] A particularly advantageous organic layer consists of polymers of paraxylylene, also called parylene. Parylene is used as a thin film coating due to its ability to exhibit highly desirable physical and electrical properties. As parylene coatings are applied in very thin layers, heat tends to quickly dissipate from the underlying components. Coated components therefore cool rapidly and are less subject to temperature-related degradation than similar components bearing other types of coatings. In addition, the parylene deposition process is more efficient when a relatively large number of substrates are coated simultaneously. As is known, the low stress properties during deposition also allow deposition on liquids. Thanks to the low stress layer, the geometry of the underlying liquid structure can be reproduced with a high level of reproducibility.
    The application of a protective coating such as parylene on liquid structures does not guarantee that the coating is waterproof and liquid permeation may appear. Other coatings, such as inorganic coatings, can also be used. Heretofore, no satisfactory coating has been provided which assures long term stability and / or which can provide design flexibility such as imposed deformations or displacements of liquid elements which could be useful for specific applications in electronics such as sensors or ISFETS or other applications such as watches.
    Summary of the invention
    The object of the invention is to provide solutions to the limitations of existing prior art devices which include encapsulated liquids.
    More specifically, the invention is achieved by the device and the manufacturing method described in the claims.
    Brief description of the drawings
    [0007] Figure 1 illustrates a cross section of the packaging concept of the invention of applying a coating to liquid arrays which have different contact angles with a substrate. The coating can be composed of a plurality of individual layers; Figure 2 shows a cross section of a package of a device comprising a coated liquid located on a flexible substrate which can also be removed; Figure 3 shows a device comprising an array of coated liquid drops which is configured as an array of micro-optical elements; FIG. 4 shows the application of coated drops of liquid and of a fluidic channel arranged on a three-dimensional element of complex shape; Figure 5 shows a substrate comprising an array of coated liquid elements configured as optical elements disposed on a watch dial structure; Figure 6 shows a substrate comprising an array of coated liquid elements configured as signs or symbols; Figure 7 shows a substrate comprising coated liquid elements disposed on a conical or substantially cylindrical shaped base; Fig. 8 shows a substrate comprising a coated liquid member of convex shape which is configured as a lens whose focus can be adjusted by varying the liquid pressure of the lens; Figure 9 shows a substrate comprising coated liquid elements disposed in a cavity of a substrate; Figure 10 illustrates a liquid arrangement which is covered with a hybrid coating comprising two coating layers; Figure 11 illustrates a liquid arrangement which comprises two liquid parts separated by an intermediate layer; Fig. 12 illustrates a device comprising a coated liquid element which has a convex liquid part and a concave liquid part; Fig. 13 illustrates a device comprising a substrate having a liquid optical waveguide disposed thereon, said optical waveguide having a Y-shaped optical splitter; Fig. 14 illustrates a device comprising a liquid element, the bulge of which can be displaced by an external force applied to the liquid element; Fig. 15 illustrates a device comprising a liquid element which is covered with a layer which comprises a set of structures; Fig. 16 illustrates a watch face which includes a plurality of liquid elements whose shape can be changed at a predetermined time. The figure illustrates the appearance of the number 3 when the time is between 3h and 3h59m; Fig. 17 illustrates a liquid watch dial element the shape of which can be changed at a predetermined time. The figure illustrates the liquid element in its OFF form and its form as the number one when in the active state. The figure schematically illustrates an underlying area or volume in which means are provided for effecting the change in shape of the liquid element; Fig. 18 illustrates a liquid watch dial element, disposed on a watch dial, the shape of which can be changed at a predetermined time. The figure illustrates the liquid element in its ON form which displays the number three. The figure schematically illustrates an underlying cavity or reservoir which is connected by a fluidic conduit configured to effect the change in shape of the liquid element by altering the pressure on the liquid in the cavity or reservoir. Figure 19 shows the application on the packaging of the liquid to a sensitive device such as a pressure sensor or a reference electrode (also used for ISFETs). The cavity is filled with a liquid or a gel and is protected by the coating. The substrate can be flexible; Figure 20 illustrates a coated MEMS sensor according to the invention.
    Description of the invention
    The present invention will be described with respect to particular embodiments and with reference to certain drawings, but the invention is not limited thereto. The drawings described are only schematic and not limiting. In the drawings, the size of some of the elements may be exaggerated and not drawn to scale for illustrative purposes. Dimensions and relative dimensions do not correspond to actual reductions in the practice of the invention.
    It should be noted that the term "comprising" in the description and the claims should not be interpreted as being limited to the means listed below, that is to say that it does not exclude other elements.
    Reference to "an embodiment" throughout the specification means that a particular feature, structure or character described in connection with the embodiment is included in at least one embodiment of the specification. invention. Thus, the expressions "in one embodiment" or "in a variant" which appear in various places of the description do not necessarily all refer to the same embodiment, but to several. Further, the features, structures or characteristics may be combined in any suitable manner, as would be apparent to those skilled in the art from this disclosure, into one or more embodiments. Likewise, various features of the invention are sometimes grouped together in a single embodiment, a single figure or description, in order to make the disclosure more readable and to improve the understanding of one or more of the various inventive aspects. Further, although certain embodiments described below include certain features included in other embodiments, but not others, combinations of features of different embodiments are intended to be within the scope of the invention. , from different embodiments. For example, all of the claimed embodiments can be used in any combination. It is also understood that the invention may be practiced without some of the many specific details set forth. In other cases, not all structures are presented in detail so as not to obscure the understanding of the description and / or figures.
    In the present document, the term "liquid" is defined in the broad sense and encompasses all types of liquids but also gels or any material which may have partially liquid or gelatinous properties. There is no limit to the type of fluid that can be used.
    The term "coating" denotes a layer or coating applied to a substance such as a liquid which may be a drop or have any shape and / or size. The coating is preferably a solid layer coating, but it can also be a coating which has at least partially solid properties and can include different parts and be partially porous.
    To encapsulate the liquid and to protect it well against diffusion and / or to allow liquid structures on complex three-dimensional structures, a new method of encapsulation must be developed. The technology makes it possible to obtain at least one of the following properties of the coated liquid parts:sharp reduction in swelling or deflation of the liquid structure;possibility of deforming the structure or the liquid element;possibility of having free-standing liquid structures on flexible substrates;possible application on bulges or cavities of substrates of complex shapes;possible application to certain sensitive devices such as sensors or electrodes;applicability to a plurality of liquid portions which are separated by an interface layer or coating of the invention;easy arrangement on a substrate by an automated machine;resistance in relatively harsh environments;biocompatibility;possibility of being removed from a substrate, for example by a peel-off process.possibility of including particles making it possible to achieve a dynamic deformation of liquid elements or to exhibit particular physical and / or chemical effects.
    More specifically, the invention is achieved by a device which comprises a substrate 10 and a liquid element 2 or a structure which is covered with a solid coating layer. It is possible that the coating layer 4 is a single layer of parylene, but the coating 4 is not limited to this type of layer.
    The application of a protective coating such as parylene or similar coatings or layers on liquid structures does not guarantee that the coating is waterproof and liquid permeation may occur. This is why other coatings such as inorganic coatings can also be used, alone or in combination with a layer of parylene.
    [0016] FIG. 10 illustrates the embodiment of a part of a device 1 which comprises at least one liquid structure 2 which is coated with a coating 4 comprising at least a first coating layer 40 and a second coating layer.
    In some versions, the first coating layer 40 may consist of: Organic materials, for example parylene including parylene-C, parylene-D, parylene-N, parylene-F and others parylenes - silicones, including PDMS - epoxies - Inorganic materials could also be used according to the present invention. Possible materials including, but not limited to metals, metal oxides, metal nitrides, metal carbides, metal oxynitrides, metal oxyborides, and combinations thereof may be used. Metals include, but are not limited to limit, titanium, gold, platinum, silver, iron, aluminum, nickel, indium, tantalum, tin, zirconium, chromium, zinc, barium, calcium, sodium, their alloys and combinations. Metal oxides include, but are not limited to, an oxygen compound and the metals mentioned above and their combinations. Some examples are titanium oxide, aluminum oxide, calcium oxide, sodium oxide, zirconium oxide. Metal nitrides include, but are not limited to, a nitrogen compound and the above-mentioned metals and combinations thereof. Examples are aluminum nitride and titanium nitride. Metal carbides include, but are not limited to, a carbon compound and the above-mentioned metals and combinations thereof. Metal oxynitrides include, but are not limited to, a compound of oxygen, nitrogen and the above-mentioned metals and combinations thereof.Other inorganic materials can be used, in particular semi-metals, semi-metallic oxides, semi-metallic nitrides, semi-metallic carbides, semi-metallic oxynitrides and their combinations.The materials are preferably, but not exclusively, silicon, germanium, boron, silicon oxide, silicon nitride, silicon oxynitride, germanium oxide, germanium nitride, oxynitride germanium, boron oxide, boron nitride, boron oxynitride and combinations thereof. Other biocompatible inorganic materials that can be deposited are calcium phosphate, barium sulfides, and barium oxysulfides.
    The structure of the materials mentioned above can be crystalline, partially crystalline or amorphous. Preferably amorphous materials are based on, inter alia, silicon, boron, carbon, titanium, aluminum, zirconium, hydroxylapatite and combinations thereof, including, but not limited to. limit, aluminum oxides, silicon oxides or a combination of these materials.epoxiesInorganic materials could also be used according to the present invention. Possible materials including, but not limited to, metals, metal oxides, metal nitrides, metal carbides, metal oxynitrides, metal oxyborides, and combinations thereof can be used. Metals include, but are not limited to, titanium, gold, platinum, silver, iron, aluminum, nickel, indium, tantalum, tin, zirconium, chromium , zinc, barium, calcium, sodium, their alloys and combinations. Metal oxides include, but are not limited to, an oxygen compound and the metals mentioned above and their combinations. Some examples are titanium oxide, aluminum oxide, calcium oxide, sodium oxide, zirconium oxide. Metal nitrides include, but are not limited to, a nitrogen compound and the above-mentioned metals and combinations thereof. Examples are aluminum nitride and titanium nitride. Metal carbides include, but are not limited to, a carbon compound and the above-mentioned metals and combinations thereof. Metal oxynitrides include, but are not limited to, a compound of oxygen, nitrogen and the above-mentioned metals and combinations thereof. Other inorganic materials can be used, including semi-metals, semi-metallic oxides, semi-metallic nitrides, semi-metallic carbides, semi-metallic oxynitrides, and combinations thereof. The materials are preferably, but not exclusively, silicon, germanium, boron, silicon oxide, silicon nitride, silicon oxynitride, germanium oxide, germanium nitride, germanium oxynitride, boron oxide , boron nitride, boron oxynitride and combinations thereof. Other biocompatible inorganic materials that can be deposited are calcium phosphate, barium sulfides, and barium oxysulfides.
    The structure of the materials mentioned above can be crystalline, partially crystalline or amorphous. Preferably amorphous materials are based on, inter alia, silicon, boron, carbon, titanium, aluminum, zirconium, hydroxylapatite and combinations thereof, including, but not limited to. limit, aluminum oxides, silicon oxides or a combination of these materials.
    In said preferred embodiments, said second coating layer 40, 42 may consist of: Organic materials, for example parylene including parylene-C, parylene-D, parylene-N, parylene- F and other types of parylenes - silicones including PDMS - epoxies - Inorganic materials could also be used according to the present invention. Possible materials including, but not limited to, metals, metal oxides, metal nitrides, metal carbides, metal oxynitrides, metal oxyborides, and combinations thereof can be used. Metals include, but are not limited to, titanium, gold, platinum, silver, iron, aluminum, nickel, indium, tantalum, tin, zirconium, chromium , zinc, barium, calcium, sodium, their alloys and combinations. Metal oxides include, but are not limited to, an oxygen compound and the metals mentioned above and their combinations. Some examples are titanium oxide, aluminum oxide, calcium oxide, sodium oxide, zirconium oxide. Metal nitrides include, but are not limited to, a nitrogen compound and the above-mentioned metals and combinations thereof. Examples are aluminum nitride and titanium nitride. Metal carbides include, but are not limited to, a carbon compound and the above-mentioned metals and combinations thereof. Metal oxynitrides include, but are not limited to, a compound of oxygen, nitrogen and the above-mentioned metals and combinations thereof. Other inorganic materials can be used, including semi-metals, semi-metallic oxides, semi-metallic nitrides, semi-metallic carbides, semi-metallic oxynitrides, and combinations thereof. The materials are preferably, but not exclusively, silicon, germanium, boron, silicon oxide, silicon nitride, silicon oxynitride, germanium oxide, germanium nitride, germanium oxynitride, boron oxide , boron nitride, boron oxynitride and combinations thereof. Other biocompatible inorganic materials that can be deposited are calcium phosphate, barium sulfides, and barium oxysulfides.
    The structure of the materials mentioned above can be crystalline, partially crystalline or amorphous. Preferably amorphous materials are based on, inter alia, silicon, boron, carbon, titanium, aluminum, zirconium, hydroxylapatite and combinations thereof, including, but not limited to. limit: For example aluminum oxides, silicon oxides or a combination of these materials.
    The liquid candidates are preferably substances having a vapor pressure of less than 0.1 mbar, but not exclusively. For example, liquid candidates can be: natural or synthetic oils, vacuum pump oil, ionic liquids, glycol, polyethylene glycol, and / or gels such as wax, grease, grease under vacuum, silicones, or a combination thereof.
    The liquid does not necessarily have to be a fluid, it can be a compliant sacrificial material such as wax or a silicone gel such as PMDS or a mixture of a fluid and a compliant sacrificial material. This means that it can be replaced later (after encapsulation), in the case of a channel for example, by another functional liquid or a gas. In the case of a lens, the liquid element coating 4 can be a coating which can be at least partially melted or made more flexible in order to change its shape.
    The liquid, or sacrificial material, can be preloaded with particles which can, after encapsulation, be moved and / or oriented to create an optical filter and / or change color. This liquid may have magnetic and / or electrical properties or may consist of a material having polarizing properties. This liquid can be colored with a dye for the visible but also for the IR and UV spectra. The liquid itself can be directly colored and be visible in the UV / visible and IR spectra.
    Figure 1 illustrates an embodiment of a cross section of the packaging concept of the invention of applying a coating to liquid arrays which have different contact angles with a substrate 10. The coating layer 4 has a first surface which is a contact surface, also defined as the first contact surface 4a which is, at least partially, in contact with a liquid 2. The term liquid 2 here generally means a liquid element, a structure or a volume that includes a coating or layer on its surface. The liquid can be composed of different types of liquids and can include at least two liquids which have different phases and / or viscosities. A liquid can also be a mixture of a gel and a liquid.
    Figure 2 shows an embodiment of a cross section of a package of a device 1 comprising a coated liquid layer 2 located on a flexible substrate 10. In some embodiments, the flexible substrate may be removed after coating. In such a case, it is preferable to provide a sacrificial layer between 6 and 10.
    The sacrificial layer can be composed of silanes, fluorine-based coatings such as PTFE, teflon-containing molecules such as FOTS, and / or liquids such as natural or synthetic oils, vacuum pump oil, ionic liquids, glycol, polyethylene glycol, and / or gels such as wax, grease, vacuum grease, silicones, or sacrificial layers such as photoresists, SU8, P70, aluminum oxides and a combination of these.
    In one embodiment of FIG. 3, a device 1 comprises an array 2 'of coated drops of liquid which is configured as an array of micro-optical elements 2.
    The typical dimensions of the coated liquid drops 2 are:diameter between 1 and 5 mm;height between 0.1 mm and 3 mm,
    There is no limit to the dimensions of the coated liquid elements 2.
    Figure 4 shows an exemplary arrangement of coated liquid drops 2 and a fluid channel disposed on a three-dimensional element of complex shape. In a variation illustrated in Figure 13, the liquid element may be configured as an optical waveguide 200, configured on a substrate 10 which may include underlying optical emission and detection elements which are not shown. on the face. The liquid optical waveguide 200 may include at least one optical splitter such as a Y splitter, as shown in Figure 12. In Figure 13, the coupled light is shown by the symbol hr.
    Figure 5 shows an exemplary device 1 based on a substrate 10 comprising an array of coated liquid elements 2 configured as optical elements disposed on a substrate facing a watch dial plate, or may be disposed directly on the watch dial plate. These optical elements 2 can be passive optical elements such as static lenses to enlarge an underlying structure or a sign such as a letter or a number, or can be configurable elements 2 as described later (this is ie the embodiments of Figures 15 to 17).
    FIG. 6 shows an embodiment of a device 1 comprising a substrate which comprises a set of coated liquid elements 2 configured as signs or symbols or letters 28.
    In one embodiment of a device 1, illustrated in FIG. 7, a substrate 10 comprises coated liquid elements 2 arranged on a base of conical or substantially cylindrical shape 12. Such a variant may be useful for providing a long optical projection length.
    In one embodiment of a device, illustrated in FIG. 8, a substrate 10 comprises a structure of convex shape on which a coated liquid element 2 is configured as a lens whose focus can be adapted by making vary the radius of curvature by the pressure P of the liquid in the lens. This convex shaped structure has a center of curvature C and may have a reflective surface or a surface coated with a dielectric coating.
    In some variants, the coated liquid elements 2 can comprise a plurality of liquid portions; each portion can be covered with at least one coating layer. This plurality of liquid portions can be made up of different types of liquids and can have different shapes, thicknesses and volumes. This plurality of liquid portions may have different electrical, magnetic or optical properties and may consist of polarizing and / or electro-optical liquid substances.
    In the embodiments, the device 1 can comprise a plurality of coated liquid elements 2 which can be elements of different color. For example, the time plate of a watch dial can be substantially covered with a coated layer of liquid and include 4 sectors made up of 4 different coated liquids, each liquid being able to have different optical or mechanical or chemical properties. In an advantageous example, not illustrated in the figures, the plate of a watch dial may comprise 12 coated liquid sectors, each sector having a different color. In the variants, means can be provided which can cause a change in color of the coated liquid layers as a function of time or other parameters, such as vibrations or temperature or any other physical or chemical parameter. This can be achieved by coated liquid sectors which are connected to different separate cavities comprising liquids of different colors which can be pumped or sucked by a system of micropumps.
    FIG. 9 shows an embodiment of a device comprising a substrate comprising coated liquid elements disposed partially inside a cavity of a substrate 10. The cavity may include a convex part 11.Figure 10 illustrates a liquid arrangement which is covered with a hybrid coating comprising two coating layers;
    FIG. 11 illustrates an embodiment of a device which comprises a liquid arrangement comprising two liquid parts separated by an intermediate layer. The two liquid parts can be different liquids and the separating coating 4 can be a different coating from the top coating 44 which covers the entire liquid element.
    FIG. 12 illustrates an embodiment of a device comprising a coated liquid element which has a convex liquid part and a concave liquid part; FIG. 14 illustrates an advantageous embodiment of a device comprising a coated liquid element whose bulge 2A can be moved by an external force F applied to the liquid element. There is no limitation to the means by which such a force F can be applied. It can be a magnetic, mechanical, electrostatic, electrical or micromechanical force, without any limitation. This force can be generated by a subsystem which can be disposed on or inside the substrate 10 of the device or by means external to the device.
    In the variants illustrated schematically in FIG. 15, at least one of the surfaces of at least one of the coating surfaces 4 may comprise microstructures 400 which have mechanical or optical properties, or both. For example, said microstructures can be diffractive structures and can be configured to diffract the difference when the shape of the liquid element is changed, as explained later in the exemplary embodiments.
    In some variants, a coated liquid element 2 or a device comprising such elements 2 can comprise at least one metasurface.
    FIG. 16 illustrates an embodiment of a device 1 comprising a liquid element which is covered with a layer which comprises a set of coated liquid portions.
    Figure 16 illustrates a specific example of a watch dial which comprises a plurality of liquid elements 62 whose shape can be changed at a predetermined time. The figure illustrates the appearance of the number 3 when the time is between 3h and 3h59m. When the time changes to four o'clock, the liquid element 62 returns to its OFF state and time 4 appears, and so on.
    FIG. 17 illustrates a liquid element 62 of a watch dial, the shape of which can be changed at a predetermined time. The figure illustrates the liquid element in its OFF form and its form as the number one when in the active state. The figure schematically illustrates an area or an underlying volume or cavity 600 in which means are arranged to effect the change in shape of the liquid element 62. For example, said means may come into contact with a part of the liquid element. element 62 having a length of L1 and a projected portion area of 620 so that element 2 has a coated element having the shape of a number one and having length portions L2 and L3 as illustrated. Each number on the dial obviously requires a special arrangement to make the 12 digits of the dial. The embodiment is not limited to numbers but may relate to other symbols or signs.
    The deformation of the coated liquid elements 2 can be achieved by electrostatic forces and electric charges. Electrical charges can be supplied to the liquid element and / or its coating layer 4 by placing electrodes in the liquid and / or in or on the coating layer or any additional layer or structure which is in contact with the liquid. and / or coating 4.
    [0047] FIG. 18 illustrates a liquid watch dial element 1, arranged on a watch dial, the shape of which can be changed at a time or at a predetermined time. The figure illustrates the liquid element in its ON form which displays the number three. The figure schematically illustrates an underlying cavity or reservoir 70 which is connected by a fluid line 72 configured to effect the change in shape of the liquid element by altering the pressure P on the liquid in the cavity or reservoir.Figure 19 shows the application to the packaging of the liquid on a sensitive device 100 such as a pressure sensor or a reference electrode (also used for ISFETs). The cavity 80 is filled with a liquid or a gel and is protected by the coating. The substrate can also be flexible.Figure 20 illustrates an encapsulated MEMS sensor with a cavity 90 and the coating layer 4 of the invention.
    It is understood that a wide variety of variations can be used to modify the shape or other properties of the coated liquid elements 2. For example, the substrate 10 can consist of heating elements or microactuators. The substrate 10 can also include microactuators on its surface which is in contact with the liquid 2.
    In some cases, a semi-permeable coating is desired and at least one layer of the coating 4 of the invention may comprise at least one such semi-permeable coating. Semi-permeable coatings can be used to allow diffuse ions to chemical sensors or to elute drugs from the liquid to the tissues.
    The invention is also achieved by a watch comprising a device 1 of the invention. In a variant, a watch comprises at least two devices according to the invention.
    The device 1 and the coated liquid elements 2 of the invention can be used in optical security systems such as cut-resistant security systems used in valuable papers such as official documents such as passports or credit cards. credit and similar documents or objects. The invention is therefore also implemented by an optical security system or a conical seal. Such a system can comprise a layer with coated liquid elements which is for example sandwiched between two layers which can be a plastic layer such as a polycarbonate layer. The invention can also be used for sensitive devices such as pressure sensors. It can also be used for electrodes. One example is reference electrodes for chemical sensors. This sensor can detect ions like PH, choline or other molecules. Such a sensor can use ISFET technology. Incorporating embedded microfluidic elements into security documents can significantly improve the difficulty of copying them, as the liquids used may include fluids that are difficult to imitate or may include networks in which a fraction contains different types of liquids, making even more difficult counterfeiting compared to existing pure optical security systems. These systems can also be used as optical guiding structures whose optical properties can be changed. The coated liquid elements of the invention, made for example on a flexible substrate, can be implemented as a tamper-evident seal to detect the intrusion of secure containers, for example, as is necessary to protect the originality of the containers. packaging of medical substances or substances of great value and / or rare and / or dangerous.
    Process
    The invention also relates to a method of manufacturing the devices and / or coated liquid elements of the invention.
    More specifically, the method of simultaneously coating a plurality of individual substrates 10 with a coating 4 comprises the following steps: a) providing a substrate 10; b) depositing at least one liquid layer 2 on at least part of said substrate 10; c) covering said part of the substrate with a liquid, by a low pressure deposition process, with an organic coating layer 40, 42, 44, 46.
    In one embodiment, an additional step d) is carried out, before or after step c), and consists in depositing an inorganic layer 40, 42, 44, 46.
    In one embodiment, the deposition of said inorganic layer and of said organic layer is carried out simultaneously and / or in the same deposition reactor.
    Steps c and d can be repeated until the desired properties of the coating 4 are obtained.
    The application of inorganic coatings, also known as passivation layers, such as SiOx on the manufacturing process includes organic coating steps such as parylene coatings, so that a multi-layer coating is provided. which considerably improves the properties of the coating. Document WO2013 / 071138 describes a method for depositing a passivation layer of SiOx on solid medical components. In applications involving liquid elements or structures, multiple stacks of organic / inorganic layers are required to fully protect a component in an integral and hermetic manner.
    It is understood that the manufacturing process comprises steps of preparing and / or cleaning the substrate. Cleaning is preferably done in ultrasonic baths.
    The manufacturing process can include steps of activating the surface of the substrate to obtain a predetermined ideal contact angle. The activation surface can be achieved by various methods, for example, immersion in a liquid, evapotranspiration of gases or activation by plasma.
    In the case of flexible substrates, the method can also include a step of pre-silanization of the substrate.
    In the variants for the manufacture of flexible stand-alone substrates, the method comprises an additional coating 6 on the substrate which can be pretreated.
    The placement of the liquid structures can be done manually, by spraying or by dispensing or by an automated CNC dispenser / sprayer. The liquid structure can also be made by dipping in the liquid where the substrate is pretreated so that the liquid adheres to the specific region. This can be done with a special surface treatment which will functionalize the specific parts, for example the oleophilic / oilophobic parts. One possible technology will be shadow masking using a structured mask.
    The activation of the liquid can be done by various methods, for example chemically, by gas evapotranspiration or by plasma activation.
    The method may include steps aimed at structuring / depositing at least part of the coating 4 of a liquid element 2. It is preferable to use a special low-stress coating process so that the liquid structures are not deformed. .
    The method can comprise an activation step to optimize the intrusion of the additional coating into at least part of the coating 4. This activation can also modify properties such as the diffusion of the coating. The activation surface can be achieved by various methods, for example, immersion in a liquid, evapotranspiration of gases or activation by plasma.
    [0066] The method may include steps aimed at structuring / depositing at least part of the coating 4. A special low-stress coating process should preferably be used so that the liquid structures are not deformed.
    In some variants, the method comprises additional coatings and activations until the required performance is achieved.
    The method can comprise a final activation of the outer layer in order to obtain specific properties such as hydrophilic / hydrophobic, oleophilic / oleophobic or others.
    In the case of flexible substrates, the method can also comprise a step of additional treatment of the substrate by a non-stick treatment or a sacrificial layer. This non-stick treatment can be composed of silanes, fluorine-based treatments such as FOTS. The sacrificial layer can be composed of fluorine-based coatings such as PTFE and / or liquids such as natural or synthetic oils, vacuum pump oil, ionic liquids, glycol, polyethylene glycol, and / or gels like wax, grease, vacuum grease, silicones, or sacrificial layers like photoresists, SU8, P70, aluminum oxides and a combination of these.
    In some variants, the method can include a step of peeling off the flexible substrate. To achieve self-supporting liquid structures, the device for peeling the substrate or the sacrificial layer is removed.
    权利要求:
    Claims (26)
    [1]
    1. Device (1) comprising a substrate (10) and at least one liquid layer (2) arranged on said substrate (10),wherein said at least one liquid layer (2) is covered with at least one coating layer (4) which is at least partially in contact with at least part of at least one of the surfaces of said liquid layer (2) .
    [2]
    2. Device (1) according to claim 1, wherein said coating layer (4) comprises at least one layer of organic material.
    [3]
    3. Device (1) according to claim 1 or 2, wherein said coating layer (4) comprises at least one layer (40, 42, 44, 46) of inorganic material.
    [4]
    4. Device according to any one of claims 1 to 3, wherein at least one of said coating layers (40, 42, 44, 46) consists of parylene.
    [5]
    5. Device according to one of claims 1 to 4, wherein the liquid of said liquid layer has a vapor pressure of less than 1 mbar, ideally less than 0.1 mbar.
    [6]
    6. Device according to any one of claims 1 to 5, wherein the device (1) comprises at least one element comprising at least two liquid parts which have an interface layer, said element being covered, at least partially, by said at least one coating layer (4).
    [7]
    Device according to Claim 6, in which at least one of said at least two liquid parts has a surface of convex shape and in which at least one of said at least two liquid parts has a surface of concave shape.
    [8]
    8. Device according to any one of claims 1 to 7, wherein said liquid element comprises particles.
    [9]
    9. Device according to claim 8, wherein said particles are metallic particles.
    [10]
    10. Device according to claim 8 or 9, wherein said particles are colorants.
    [11]
    11. Device according to any one of claims 1 to 10, comprising means for modifying the shape and / or the size of the coated liquid element.
    [12]
    12. Device according to any one of claims 1 to 11, wherein said substrate (4) comprises a reservoir or a cavity which is in fluid connection with said liquid element coated by a conductor.
    [13]
    13. Device according to any one of claims 1 to 12, wherein said device comprises a flexible layer which can be removed from the substrate (4).
    [14]
    14. Device according to one of claims 1 to 13, being a sensitive device comprising at least one electrode.
    [15]
    15. Device according to claim 14, wherein said electrode is a reference electrode for a chemical sensor.
    [16]
    16. Device according to claim 15, wherein the chemical sensor is manufactured by ISFET technology.
    [17]
    17. Device according to one of claims 1 to 16, comprising a plurality of coated sensors.
    [18]
    18. Device according to one of claims 1 to 17, being a pressure sensor.
    [19]
    19. Watch dial (60) comprising at least part of the device according to one of claims 1 to 18.
    [20]
    20. The watch face (60) of claim 19, wherein said watch face comprises a support comprising a plurality of coated liquid elements arranged in a predetermined pattern.
    [21]
    21. A watch dial (60) according to claim 20, wherein a set of coated liquid elements are disposed on a substrate (4) which is parallel to or which constitutes the watch face, each of said coated liquid elements facing each other. a watch face number.
    [22]
    22. A watch dial according to claim 20 or 22, wherein said support (10) comprises means (600, 70, 72, F) so that at least one of said coated fluidic elements (2, 62) can change from one to another. forms at a predetermined time when the watch face is in operation.
    [23]
    23. A watch dial according to claim 22, wherein, at said predetermined time, the shape of at least one of said coated fluidic elements (2, 62) is changed into a number and / or letter shape.
    [24]
    24. A method of simultaneously coating a plurality of individual substrates (10) with a coating (4) comprising the following steps:a) providing a substrate (10);b) depositing at least one liquid layer (2) on at least part of said substrate (10);c) covering said part of the substrate with a liquid, by a low pressure deposition process, with an organic coating layer (40, 42, 44, 46).
    [25]
    25. The method of claim 24, wherein an additional step d) is performed, before or after step c), and consisting in depositing an inorganic layer (40, 42, 44, 46).
    [26]
    26. The method of claim 24 or claim 25, wherein the deposition of said inorganic layer and said organic layer is carried out simultaneously and / or in the same deposition reactor.
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    公开号 | 申请日 | 公开日 | 申请人 | 专利标题
    法律状态:
    优先权:
    申请号 | 申请日 | 专利标题
    EP19180695|2019-06-17|
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